Introduction to Semiconductor Manufacturing Technology

by Xiao Hong

IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.

664 pages, Hardcover

First published June 1, 2012

About the author

Librarian Note: There is more than one author in the Goodreads database with this name.

See Xiao Hong for the Chinese novelist.

Reviews

[Robin Dong · Rating 5 out of 5]

Give a very clear and detailed introduction to the manufactory of Semiconductor