pp. 1222, as new, in shrink wrap, " Since 2004 the Springer Handbook of Nanotechnology has established itself as the definitive reference in the nanoscience and nanotechnology area. It integrates the knowledge from nanofabrication, nanodevices, nanomechanics, Nanotribology, materials science, and reliability engineering in just one volume. Beside the presentation of nanostructures, micro/nanofabrication, and micro/nanodevices, special…
I've read criticisms that the text is a couple of years behind (2006 technology referenced in the 2008 edition), but I think the additional illustrations and images make up for it. Best resource I've seen for really illustrating the subject material. Since this is a handbook, it covers about every topic under the sun, but not in ultra-fine detail. Great for an introduction to a given MEMS topic.