Semiconductors and Semimetals, Volume 51A: Identification of Defects in Semiconductors

by Robert K. Willardson (editor), Eicke R. Weber (Editor), Michael Stavola (Editor)

This volume has contributions on Advanced Characterization Techniques with a focus on defect identification. The combination of beam techniques with electrical and optical characterization has not been discussed elsewhere.

Kindle Edition

First published January 1, 1998