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IC Technology Book
Contents:
1. Introduction to IC Technology.
2. Introduction to Technologies
3. Diffusion
4. Oxidation
5. Ion Implantation
6. Chemical Vapour Deposition and Epitaxy
7. Pattern Transfer
8. VLSI Process Integration
P. Papers
1. Introduction to IC Technology.
2. Introduction to Technologies
3. Diffusion
4. Oxidation
5. Ion Implantation
6. Chemical Vapour Deposition and Epitaxy
7. Pattern Transfer
8. VLSI Process Integration
P. Papers
246 pages, Paperback
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