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IC Technology Book
Aarti Sharma
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Contents:
1. Introduction to IC Technology.
2. Introduction to Technologies
3. Diffusion
4. Oxidation
5. Ion Implantation
6. Chemical Vapour Deposition and Epitaxy
7. Pattern Transfer
8. VLSI Process Integration
P. Papers
246 pages, Paperback
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About the author
Aarti Sharma
14 books
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