Foundations of MEMS, 2/e

by Chang Liu

For courses in Micro-Electro-Mechanical Systems (MEMS) taken byadvanced undergraduate students, beginning graduate students, andprofessionals.Foundations of MEMS is an entry-level text designed tosystematically teach the specifics of MEMS to an interdisciplinaryaudience. Liu discusses designs, materials, and fabrication issuesrelated to the MEMS field by employing concepts from both theelectrical and mechanical engineering domains and by incorporatingevolving microfabrication technology — all in atime-efficient and methodical manner. A wealth of examples andproblems solidify students’ understanding of abstractconcepts and provide ample opportunities for practicing criticalthinking.

576 pages, Kindle Edition

First published August 1, 2005

Reviews

[Aldo Matz · Rating 5 out of 5]

It's great

[Joe Cole · Rating 5 out of 5]

I needed the book for an undergrad MEMS course . Good to understand sensing and actuation methods, and updated with the latest trends in MEMS industry