Microchip Fabrication: A Practical Guide to Semiconductor Processing

by Peter Van Zant

The most complete, current guide to semiconductor processing Fully revised to cover the latest advances in the field, "Microchip Fabrication," Sixth Edition explains every stage of semiconductor processing, from raw material preparation to testing to packaging and shipping the finished device. This practical resource provides easy-to-understand information on the physics, chemistry, and electronic fundamentals underlying the sophisticated manufacturing materials and processes of modern semiconductors.

State-of-the-art processes and cutting-edge technologies used in the patterning, doping, and layering steps are discussed in this new edition. Filled with detailed illustrations and real-world examples, this is a comprehensive, up-to-date introduction to the technological backbone of the high-tech industry.

COVERAGE The semiconductor industry Properties of semiconductor materials and chemicals Crystal growth and silicon wafer preparation Wafer fabrication and packaging Contamination control Productivity and process yields Oxidation The ten-step patterning process--surface preparation to exposure; developing to final inspection Next generation lithography Doping Layer deposition Metallization Process and device evaluation The business of wafer fabrication Devices and integrated circuit formation Integrated circuits Packaging

Genres: Technology, Engineering

577 pages, Kindle Edition

First published January 1, 1986

Reviews

[Jorgen Lundgren · Rating 4 out of 5]

A good introduction to the entire process of semiconductor processing. From raw silicon wafers to finished devices.All explained in a simple non too technical language. You will have a solid working knowledge of all the important issues and processes,materials and methods involved in semiconductor technology.

[Carter · Rating 4 out of 5]

This particular volume, is less helpful than I hoped- there are details I didn't expect, like company functional units and organization. Fairly introductory.