Semiconductor Manufacturing Technology

by Michael Quirk, Julian Serda

In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting. For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.

666 pages, Paperback

First published November 19, 2000

Reviews

[Nilesh Bahir · Rating 5 out of 5]

It's a very friendly and well organized source to get overall idea about Semiconductor Manufacturing processes, steps, background, theory, business practices and variants.

Most processes and ideas are simplified at laywomanman's level of understanding that it makes it not a dull and dry read.