Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 3: Materials, Design, and Practical Considerations

by J.R. Gaines, Matthew Healy

'Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 3: Materials, Design, and Practical Considerations' introduces the reader to vacuum system design through a review of materials appropriate for vacuum applications, and a discussion of the range of mechanical, logistical, and environmental considerations that should be addressed when developing a vacuum system design. The book includes a review of common chamber styles, including boxes, cylinders, and spheres, as well as bespoke 3D-printed enclosures for high and ultrahigh vacuum. A simple deposition system, based on direct current magnetron sputtering for single and multiple cathodes, is provided as an example. Beyond system design, this volume covers critical operational issues, including vacuum hygiene for operators and cleaning for vacuum service, that every vacuum technologist must know. This volume also provides a review of modeling approaches for vacuum systems that covers the mechanical and vacuum performance of systems, with a focus on system optimization.• Covers how to design simple and practical vacuum systems, as well as critical hygiene, operation, and cleaning procedures required to optimize performance• Discusses materials for vacuum service, component selection, application-specific considerations for thin-film deposition systems, in addition to operational issues like cleanliness• Provides basic understanding of component selection for high and ultrahigh vacuum systems and chamber design considerations, using sputtered thin-film deposition as an application example

Kindle Edition

Published November 1, 2025