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Foundations of MEMS
International reprint edition of ISBN-13: 978-0132497367. Paperback. Published in China. Contents in ENGLISH and totally same as US Edition. (The follower seller, Steven Bookstore, may NOT provide what the detail page shows according to their description)
560 pages, Paperback
First published August 1, 2005
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Displaying 1 - 2 of 2 reviews
April 11, 2013
It's great
April 14, 2017
I needed the book for an undergrad MEMS course . Good to understand sensing and actuation methods, and updated with the latest trends in MEMS industry
Displaying 1 - 2 of 2 reviews