RF Power for Industrial Applications

by Louis E. Frenzel

This book, the only one of its kind on the market, focuses on RF (Radio Frequency) power for use in semiconductor manufacturing equipment that generate a plasma for processing wafers. The concepts, equipment, and techniques covered in this book emphasize industrial applications, but are also applicable to most radio communications equipment. Topics covered in this unique book are: signal sources, RF power amplifier fundamentals, high power RF amplifiers, impedance matching, transmission lines, smith charts, power measurement and control, troubleshooting and maintenance of RF power systems, and industrial applications of RF power. This book is useful for engineers and technicians who install, operate, maintain, service, and repair RF power generating equipment. It is also useful for continuing education courses in company training programs, industrial training courses, or seminars and workshops.

288 pages, Paperback

First published May 31, 2003