Frontiers of Characterization and Metrology for Nanoelectronics: 2009

by David G. Seiler (Editor), Rajinder P. Khosla (Editor), Dan Herr (Editor)

As the semiconductor industry continues to move toward silicon nanoelectronics and beyond, the introduction of new materials, innovative processing and assembly, and novel devices brings formidable metrology challenges. This book emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics.

320 pages, Hardcover

First published October 26, 2009