In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology , Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.
You can read my full summary here (website is unadvertised). It includes some things I felt were important that O'Hanlon left out and excludes some things from the book I felt weren't as important if you have a basic physics/chemistry background, e.g., gas properties).
If your career deals with vacuum, read this book cover-to-cover. O'Hanlon begins with the basics of gases (their properties, flow regimes, relation with solids) and progresses to actual vacuum concepts. The mathematics behind vacuum are included with explanations, as well as lay-person descriptions. While the descriptions are nice, I encourage the reader to search the internet for videos of how the various pumps operate, as it is much clearer than words and a static figure.
Third edition should be purchased if possible—the second edition was published before the invention of some important technology, e.g., scroll pumps.