G.S. Mathad
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Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes
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published
1998
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Plasma Processing XII
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published
1999
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Highly Selective Dry Etching and Damage Control
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published
1993
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2 editions
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Proceedings of the Tenth Symposium on Plasma Processing
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published
1994
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Interconnect and contact metallization for ULSI: Proceedings of the international symposium
by
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published
2000
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