Franklin Schellenberg
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Handbook of Photomask Manufacturing Technology
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published
2005
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EDA for IC Implementation, Circuit Design, and Process Technology
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published
2006
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Selected Papers on Resolution Enhancement Techniques in Optical Lithography (Spie Milestone Series)
2 editions
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published
2004
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Computational Semiconductor Processing: Lithography for an IC DFM
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published
2010
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